Dr. Adriana Viorica Szeghalmi Profile

Dr. Adriana Viorica Szeghalmi

Group Leader at Friedrich-Schiller-Univ Jena

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Author

Publications (15)

Proceedings Article | 13 March 2024 Presentation + Paper

Quasi-BIC resonance in TiO2 metasurface for emission enhancement of two-dimensional material

Athira Kuppadakkath, Angela Barreda, Muyi Yang, Ayesheh Bashiri, Seung Heon Han, Tobias Bucher, Adriana Szeghalmi, Audrey Turchanin, Antony George, Thomas Pertsch, Duk-Yong Choi, Isabelle Staude, Falk Eilenberger

Proceedings Volume 12896, 128960C (2024) https://doi.org/10.1117/12.3003130

KEYWORDS: Resonance enhancement, Fabrication, Crystals, Annealing, Design, Coating, 2D materials, Titanium dioxide

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Proceedings Article | 15 July 2022 Paper

Environmentally stable iridium mirror coatings for the infrared spectral range

Thorsten Döhring, Manfred Stollenwerk, Paul Schmitt, Adriana Szeghalmi

Proceedings Volume 12298, 122980A (2022) https://doi.org/10.1117/12.2632057

KEYWORDS: Iridium, Reflectivity, Atomic layer deposition, Optical coatings, Mirrors, Infrared coatings, Silver, Gold, Refractive index, Sputter deposition

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Proceedings Article | 30 May 2022 Presentation

On-chip carrier-envelope phase scanner

Václav Hanus, Beatrix Fehér , Zsuzsanna Pápa, Judit Budai, Pallabi Paul, Adriana Szeghalmi, Péter Dombi

Proceedings Volume PC12143, PC1214310 (2022) https://doi.org/10.1117/12.2620706

KEYWORDS: Scanners, Dielectrics, Pulsed laser operation, Electrodes, Spatial resolution, Oscillators, Nanoparticles, Gold, Colorimetry

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Proceedings Article | 30 May 2022 Presentation

Structural and optical properties of atomically engineered Ir/Al2O3 nanocomposites

Pallabi Paul, Paul Schmitt, Zilong Wang, Weiwei Li, Matthias Kling, Andreas Tünnermann, Adriana Szeghalmi

Proceedings Volume PC12143, PC121430Y (2022) https://doi.org/10.1117/12.2621530

KEYWORDS: Optical properties, Nanocomposites, Atomic layer deposition, Nonlinear optical materials, Superlattices, Photonic crystals, Photonic crystal devices, Interfaces, Coating, Sum-frequency generation

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Proceedings Article | 12 September 2021 Presentation + Paper

Conformal antireflection coating on polycarbonate domes

Pallabi Paul, Vivek Beladiya, David Kästner, Ulrike Schulz, Martin Burkhardt, Adriana Viorica Szeghalmi

Proceedings Volume 11872, 118720E (2021) https://doi.org/10.1117/12.2595915

KEYWORDS: Antireflective coatings, Coating, Reflectivity, Domes, Atomic layer deposition, Plasma, Optics manufacturing, Thin films, Functional oxides

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Proceedings Article | 16 November 2018 Paper

Laser-induced damage threshold of nanoporous single-layer ALD antireflective coatings

Thomas Gischkat, Roelene Botha, Igor Stevanovic, Adriana Szeghalmi, Lilit Ghazaryan, Andreas Bächli

Proceedings Volume 10805, 108051V (2018) https://doi.org/10.1117/12.2500927

KEYWORDS: Atomic layer deposition, Coating, Laser induced damage, Antireflective coatings, Nitrogen, Laser damage threshold, Silica, Laser irradiation, Refractive index, Wet etching

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Proceedings Article | 5 June 2018 Paper

Reproducibility and stability of nanoporous SiO2 thin film coatings

L. Ghazaryan, A. Szeghalmi

Proceedings Volume 10691, 1069110 (2018) https://doi.org/10.1117/12.2313847

KEYWORDS: Atomic layer deposition, Refractive index, Antireflective coatings, Annealing, Transmittance, Etching, Silica, Thin film coatings, Optical coatings

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Proceedings Article | 5 June 2018 Paper

Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing

V. Beladiya, T. Faraz, W. M. M. Kessels, A. Tünnermann, A. Szeghalmi

Proceedings Volume 10691, 106910E (2018) https://doi.org/10.1117/12.2312516

KEYWORDS: Aluminum, Plasma, Argon, Oxygen, Refractive index, Carbon, Thin films, FT-IR spectroscopy, Atomic layer deposition, Ions

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Proceedings Article | 17 November 2017 Open Access

High-reflective coatings for ground and space based applications

M. Schürmann, S. Schwinde, P. Jobst, O. Stenzel, S. Wilbrandt, A. Szeghalmi, A. Bingel, P. Munzert, N. Kaiser

Proceedings Volume 10563, 105630M (2017) https://doi.org/10.1117/12.2304172

KEYWORDS: Silver, Optical coatings, Reflectivity, Aluminum, Atomic layer deposition, Particles, Contamination, Mirrors, Multilayers, Humidity

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Proceedings Article | 20 February 2017 Paper

Ta2O5/ Al2O3/ SiO2 - antireflective coating for non-planar optical surfaces by atomic layer deposition

K. Pfeiffer, U. Schulz, A. Tünnermann, A. Szeghalmi

Proceedings Volume 10115, 1011513 (2017) https://doi.org/10.1117/12.2250272

KEYWORDS: Atomic layer deposition, Antireflective coatings, Refractive index, Silica, Reflection, Thin film coatings, Thin films, Optical coatings, Thin film deposition, Lenses, Tantalum, Silicon, Aluminum, Reflectivity, Glasses

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Proceedings Article | 23 September 2015 Paper

Composite materials and nanoporous thin layers made by atomic layer deposition

Lilit Ghazaryan, Ernst-Bernhard Kley, Andreas Tünnermann, Adriana Szeghalmi

Proceedings Volume 9627, 96270P (2015) https://doi.org/10.1117/12.2192972

KEYWORDS: Atomic layer deposition, Silica, Refractive index, Etching, Composites, Diffusion, Aluminum, Oxides, Molecules, Spectroscopic ellipsometry

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Proceedings Article | 23 September 2015 Paper

High-efficiency embedded transmission grating

Stephan Ratzsch, Ernst-Bernhard Kley, Andreas Tünnermann, Adriana Szeghalmi

Proceedings Volume 9627, 96271G (2015) https://doi.org/10.1117/12.2191223

KEYWORDS: Diffraction gratings, Atomic layer deposition, Diffraction, Refractive index, Ion beams, Oxygen, Etching, Silica, Coating, Titanium dioxide

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Proceedings Article | 23 September 2015 Paper

Atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material

Kristin Pfeiffer, Svetlana Shestaeva, Astrid Bingel, Peter Munzert, Ulrike Schulz, Norbert Kaiser, Andreas Tünnermann, Adriana Szeghalmi

Proceedings Volume 9627, 96270Q (2015) https://doi.org/10.1117/12.2191283

KEYWORDS: Silica, Atomic layer deposition, Antireflective coatings, Thin films, Coating, Plasma, Refractive index, Glasses, Transmittance, Oxygen

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Proceedings Article | 26 September 2013 Paper

Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays

Kahraman Keskinbora, Anna-Lena Robisch, Marcel Mayer, Corinne Grévent, Adriana Szeghalmi, Mato Knez, Markus Weigand, Irina Snigireva, Anatoly Snigirev, Tim Salditt, Gisela Schütz

Proceedings Volume 8851, 885119 (2013) https://doi.org/10.1117/12.2027251

KEYWORDS: Hard x-rays, Atomic layer deposition, Ion beams, Zone plates, Electron beam lithography, X-rays, X-ray microscopy, Fabrication, X-ray optics, Microscopy

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Proceedings Article | 4 October 2011 Paper

Atomic layer deposition of iridium thin films and their application in gold electrodeposition

A. Szeghalmi, M. Arnold, A. Berger, N. Schammelt, K. Fuechsel, M. Knez, E. Kley, D. R. Zahn, A. Tuennermann

Proceedings Volume 8168, 81680K (2011) https://doi.org/10.1117/12.896818

KEYWORDS: Gold, Atomic layer deposition, Iridium, Thin films, Electrodes, Multilayers, Infrared imaging, Transmission electron microscopy, Coating, Metals

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Showing 5 of 15 publications

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