Mr. Cyrille Laviron Profile

Cyrille Laviron

at CEA-LETI

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 20 September 2004 Paper

Laser doping for microelectronics and microtechnology

Thierry Sarnet, Gurwan Kerrien, Nourdin Yaakoubi, Alain Bosseboeuf, Elisabeth Dufour-Gergam, Dominique Debarre, Jacques Boulmer, Kuniyuki Kakushima, Cyrille Laviron, Miguel Hernandez, Julien Venturini, Tarik Bourouina

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.547759

KEYWORDS: Silicon, Bridges, Laser processing, Boron, Doping, Annealing, Semiconductor lasers, Laser applications, Laser energy, Photomasks

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Proceedings Article | 11 August 1999 Paper

Lithographic CD variation in contact, via, local interconnect, and damascene levels

Yorick Trouiller, Anne Didiergeorges, Gilles Fanget, Cyrille Laviron, Corinne Comboroure, Yves Quere

Proceedings Volume 3883, (1999) https://doi.org/10.1117/12.360577

KEYWORDS: Critical dimension metrology, Dielectrics, Oxides, Photoresist processing, Metals, Reflectivity, Chemical mechanical planarization, Silicon, Interfaces, Lithography

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Proceedings Article | 26 July 1999 Paper

New trends in Brunner's relation: dielectric levels

Yorick Trouiller, Anne Didiergeorges, Gilles Fanget, Cyrille Laviron, Corinne Comboure, Yves Quere

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354407

KEYWORDS: Critical dimension metrology, Dielectrics, Oxides, Photoresist processing, Metals, Reflectivity, Silicon, Chemical mechanical planarization, Copper, Interfaces

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