We investigate fluid jet polishing (FJP) for its potential to be used for freeform finishing of fused silica and potassium dihydrogen phosphate (KDP and DKDP) crystals without compromising laser damage performance. As part of this effort, a different slurry for each material was utilized. Samples with different amounts of material removed by FJP were prepared for damage testing. The results show that FJP can improve or maintain the laser damage resistance of these materials while simultaneously functioning as a deterministic, sub-aperture finishing method.
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