Dr. Deoksuk Jang Profile

Dr. Deoksuk Jang

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Publications (1)

Proceedings Article | 1 August 2021 Presentation + Paper

Through-focus spot shaping with asymmetric pupil optimization for laser stealth dicing

Akinori Ohkubo, Sungho Jang, Youngchul Kwon, Deoksuk Jang, Jungchul Lee

Proceedings Volume 11818, 118180F (2021) https://doi.org/10.1117/12.2593641

KEYWORDS: Wavefront aberrations, Wafer dicing, Laser beam propagation, Optical filters, Semiconducting wafers, Silicon, Spatial light modulators, Beam shaping, Laser processing, Pulsed laser operation, Semiconductor lasers, Monochromatic aberrations, Modulation

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