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Dimitrios M. Tsamados
at ENSERG
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Publications (1)
Proceedings Article | 30 December 2003 Paper
Wall shear stress and pressure sensor development for active control of flow
Dimitrios Tsamados, Delphine Meunier, Mourad Laghrouche, Jumana Boussey, Sedat Tardu
Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524533
KEYWORDS: Sensors, Semiconducting wafers, Silicon, Resistance, Etching, Calibration, Finite element methods, Protactinium, Deep reactive ion etching, Lithography
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