Prof. Dirk Oberschmidt Profile

Prof. Dirk Oberschmidt

at Technische Universität Berlin

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Author

Publications (3)

SPIE Journal Paper | 10 April 2024 Open Access

Ultraprecision machining of aberration-corrected diffractive optics with phase correcting groove trajectories

Marco Jagodzinski, Stefan Kühne, Dirk Oberschmidt

JOM, Vol. 4, Issue 02, 023501, (April 2024) https://doi.org/10.1117/12.10.1117/1.JOM.4.2.023501

KEYWORDS: Optical gratings, Diffraction gratings, Manufacturing, Blazed gratings, Optics manufacturing, Wavefronts, Wavefront errors, Optical microsystems, Optical design, Lithography

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Proceedings Article | 3 October 2023 Presentation + Paper

Simulation of gallium phosphide cutting mechanism in ductile regime using molecular dynamics

M. R. P. M. Tavares, D. Rolon, J. Kober, S. Kühne, R. Schroeter, D. Oberschmidt

Proceedings Volume 12653, 1265306 (2023) https://doi.org/10.1117/12.2677547

KEYWORDS: Diamond, Crystals, Mathematical modeling, Silicon, Deformation, Computer simulations, Semiconductors

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Proceedings Article | 28 September 2023 Presentation + Paper

Multicriteria optimization and correction of the electron beam spot with the multivariate Gaussian distribution and the spot sizes by the full width at half maximum as objective functions

Dmitrij Hasenkampf, Dirk Oberschmidt, Aniouar Bjeoumikhov

Proceedings Volume 12664, 1266403 (2023) https://doi.org/10.1117/12.2676334

KEYWORDS: Anodes, X-rays, Design and modelling, Electron beams, Electromagnetism, Computer simulations, X-ray optics

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