The refractive index of a substance is closely related to its optical properties, concentration, composition, dispersion and other properties, and the research on fiber Bragg grating type refractive index sensor and fiber interferometric type refractive index sensor based on optical principle is the most concerned. Based on the relationship between optical resonance and defect states, a dual DBR structure composed of silicon and air alternation is designed to achieve a wider modulation range in the photonic band gap. The rigorous coupled wave analysis (RCWA) method was used to quantitatively calculate transmissivity of each wavelength photon, and then spectral data in different displacement were obtained. By analyzing the defect states of the spectrum, the optical structure of the refractive index sensor was determined, and the performance index of the modulation system under this structure was obtained: the wavelength modulation range was from 1.2 micron to 2.7 micron, the corresponding displacement range was 0-1.5 micron, the system sensitivity was up to 1019 nm/RIU, and the linear range of the first-order defect state mode was 0.999. The minimum peak transmittance of defect mode is greater than 0.65 based on 10 pm wavelength calculated step. Good linearity and high peak transmittance also provide strong support for high performance sensors. The optical system can be used in a variety of applications, such as biochemical sensing detection. There is no doubt that the performance of the device will exceed the reported performance due to the improvements in the above functional features.
This study presents a microelectromechanical systems S-springs vibration ring gyroscope (MSVRG), which is driven by electrostatic force and detected by capacitance. First, a ring resonator structure with eight S-shaped symmetrical supporting springs is developed, and the capacitor electrodes are designed according to the vibration characteristics of the ring resonator. Then, a precise equivalent stiffness model of MSVRG is established based on the vibration mechanics and the Cassette theorem, which can be employed for any other ring gyroscope with differently shaped springs. Moreover, the mode resonant frequency error of between experiments, finite-element analysis (FEA) and theory calculation, is 10.54% and 3.76%, respectively. After that, the process of MSVRG structure is introduced and the structure is manufactured, and the theory calculation and FEA value with processed parameters have 1.19% and 4.59% difference with resonant frequency tested value, respectively. Finally, the static performance of the fabricated MSVRG is tested, and the bias instability is about 0.0119 deg/s and angle random walk is about 0.0359 deg/s1/2 at room temperature.
This paper proposes an electrostatic stiffness correction method for the quadrature error (QUER) in a decoupled dual-mass gyroscope structure. The QUER is caused by the imperfections during the structure manufacturing process, and the two masses usually have different QUERs. The harm contribution to the Coriolis signal is analyzed and quantified. The generating forms of QUER motion in both masses are analyzed, the correction electrodes’ working principle is introduced, and a single mass individual correction method is proposed. The QUER stiffness correction system is designed based on a PI controller, and the experiments are arranged to verify the theoretical analysis. The bias stability decreases from 2.06 to 0.64 deg/h after the QUER correction, and the parameters of scale factor such as nonlinearly, asymmetry, and repeatability, reduce from 143, 557, and 210 ppm to 84, 242, and 175 ppm, respectively.
This paper introduces a novel thin silicon rotor turned gyroscope (SRTG). With a micro motor driving the rotor and
two pairs of torsion bars and a gimbal ring realizing dynamical tuning, this gyroscope inherits the structure and working
principle of the dynamically tuned gyroscope (DTG). The torsion bars, gimbal ring, rotor, annunciator and torquer are
processed by micro-mechanical technology. The declination of rotor is sensed by differential capacitances. The rotor is
rebalanced by electrostatic forces. In this paper, the details about the structure and working principle of SRTG is
presented, the block diagram of the circuit in SRTG is discussed. Experiments are done on one sensitive direction of
SRTG, and the curve is given, proved the feasibility.
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