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Jinwei Li
at Beijing Institute of Technology
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Author
Publications (1)
Proceedings Article | 12 March 2008 Paper
The preparation of AZO films with RF sputtering
Zhinong Yu, Jin Xu, We Xue, Xia Li, Jinwei Li
Proceedings Volume 6624, 66241O (2008) https://doi.org/10.1117/12.791173
KEYWORDS: Resistance, Oxygen, Argon, Transmittance, Sputter deposition, Zinc oxide, Annealing, Crystals, Aluminum, Thin films
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