Dr. Leifeng Cao Profile

Dr. Leifeng Cao

at China Academy of Engineering Physics

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 18 October 2017 Presentation

Single-order diffraction grating for soft x-ray: state of the art and perspective (Conference Presentation)

Leifeng Cao

Proceedings Volume 10386, 103860O (2017) https://doi.org/10.1117/12.2272532

KEYWORDS: X-rays, Diffraction gratings, X-ray diffraction, Diffraction, Spectroscopy, Plasma diagnostics, X-ray astronomy, X-ray optics, Plasma spectroscopy, Crystals

Read Abstract +

Proceedings Article | 23 August 2017 Presentation + Paper

Nanofabrication of free-standing spectroscopic photon sieves operating in soft x-ray region

Xiaoli Zhu, Lai Wei, Hailiang Li, Leifeng Cao, Changqing Xie

Proceedings Volume 10386, 103860Q (2017) https://doi.org/10.1117/12.2272803

KEYWORDS: Electron beam lithography, X-rays, Diffraction, Spectroscopy, Diffraction gratings, Lithography, X-ray lithography, X-ray diffraction, Gold

Read Abstract +

SPIE Journal Paper | 19 August 2017

Nanofabrication and characterization of high-line-density x-ray transmission gratings

Xiaoli Zhu, Hailiang Li, Leifeng Cao, Shenye Liu, Peixiong Shi, Changqing Xie

JM3, Vol. 16, Issue 03, 034503, (August 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.3.034503

KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

Read Abstract +

Proceedings Article | 25 August 2010 Paper

Study of 18.2-nm Schwarzschild microscope for plasma diagnostics

Xin Wang, Baozhong Mu, Yi Huang, Zirong Zhai, Shengzhen Yi, Li Jiang, Jingtao Zhu, Zhanshan Wang, Hongjie Liu, Leifeng Cao, Yuqiu Gu

Proceedings Volume 7801, 78010G (2010) https://doi.org/10.1117/12.860281

KEYWORDS: Microscopes, Mirrors, Spatial resolution, Plasma diagnostics, Reflectivity, Objectives, Multilayers, Plasma, Optical components, Copper

Read Abstract +

SPIE Journal Paper | 1 May 2008

Design, fabrication, and test of soft x-ray sinusoidal transmission grating

Min Zhao, Xiaoli Zhu, Baoqin Chen, Changqing Xie, Min Liu, Jiebing Niu, Longyu Kuang, Leifeng Cao

OE, Vol. 47, Issue 05, 058001, (May 2008) https://doi.org/10.1117/12.10.1117/1.2919717

KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

Read Abstract +

Proceedings Article | 21 November 2007 Paper

Fabrication of quantum dot array diffraction grating for soft x-ray spectroscopy

Min Zhao, XiaoLi Zhu, Baoqin Chen, ChangQing Xie, Ming Liu, Leifeng Cao

Proceedings Volume 6724, 67241O (2007) https://doi.org/10.1117/12.782916

KEYWORDS: X-rays, Spectroscopy, Diffraction, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, Photomasks, Electron beams, Silicon

Read Abstract +

Proceedings Article | 14 November 2007 Paper

Fabrication of x-ray diffractive optical elements for ICF target diagnosis

Xiaoli Zhu, Deqiang Wang, Changqing Xie, Leifeng Cao, Jiamin Yang, Tianchun Ye, Jiebin Niu, Baoqin Chen, Ming Liu

Proceedings Volume 6722, 672208 (2007) https://doi.org/10.1117/12.782678

KEYWORDS: X-rays, Electron beam lithography, Diffractive optical elements, Electroplating, Gold, Photomasks, X-ray diffraction, X-ray lithography, Silicon, X-ray optics

Read Abstract +

SPIE Journal Paper | 1 January 2006

Microzone plates with high-aspect ratio fabricated by e-beam and x-ray lithography

De-Qiang Wang, Leifeng Cao, Changqing Xie, Ming Liu, Tianchun Ye

JM3, Vol. 5, Issue 01, 013002, (January 2006) https://doi.org/10.1117/12.10.1117/1.2170110

KEYWORDS: Electron beam lithography, X-ray lithography, Photomasks, Gold, Nickel, X-rays, Scanning electron microscopy, Lithography, Silicon, Zone plates

Read Abstract +

Showing 5 of 8 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years