Maciej Kaminski
at Institute of Microelectronics and Photonics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2019 Presentation
Proceedings Volume 10918, 1091818 (2019) https://doi.org/10.1117/12.2510415
KEYWORDS: Field effect transistors, Silicon, Etching, Plasma treatment, Transistors, Switching, Transmission electron microscopy, Ion implantation, Oxides, Argon

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