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Naganori Takezawa
at Waseda Univ
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Publications (1)
Proceedings Article | 23 January 1997 Paper
In-situ measurement of the optical constant of ultrathin films using optical fiber sensor
Naganori Takezawa, Isamu Kato
Proceedings Volume 2997, (1997) https://doi.org/10.1117/12.264166
KEYWORDS: Fiber optics sensors, Sensors, Waveguides, Transmittance, Thin films, Absorption, In situ metrology, Optical testing, Optical fibers, Oxidation
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