Deep subwavelength-featured photonic crystals fabricated in a monolithic silicon photonics technology

Sharon M. Weiss

doi:10.1117/12.3012006

13 March 2024 Deep subwavelength-featured photonic crystals fabricated in a monolithic silicon photonics technology

Sharon M. Weiss

Proceedings Volume PC12896, Photonic and Phononic Properties of Engineered Nanostructures XIV; PC128960R (2024) https://doi.org/10.1117/12.3012006
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

We report the scalable fabrication and characterization of photonic crystals (PhC) with feature sizes below 100 nm. In particular, we demonstrate antislot PhC nanobeam waveguides featuring hourglass-shaped unit cells that support enhanced light-matter interaction in silicon, and slotted PhC nanobeam waveguides that support enhanced light-matter interaction in air or other low refractive index media. These PhCs were fabricated using a monolithic silicon photonics technology at GlobalFoundries. Applications of deep subwavelength featured photonic crystals in optical modulators and biosensors will be discussed.

Conference Presentation

Citation Download Citation

Sharon M. Weiss "Deep subwavelength-featured photonic crystals fabricated in a monolithic silicon photonics technology", Proc. SPIE PC12896, Photonic and Phononic Properties of Engineered Nanostructures XIV, PC128960R (13 March 2024); https://doi.org/10.1117/12.3012006

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