The continued evolution of quantum technologies requires heterogenous material platforms for packaging, scalability, integration, and multiplexing. Here, we demonstrate direct bonding of single-crystal diamond membranes, a proven host of coherent qubits for networking and sensing, to a wide variety of materials including fused silica, sapphire, thermal oxide, and lithium niobate. We realize bonded films with thickness as low as 10 nanometers. TEM imaging reveals sub-nm interface regions between crystalline diamond and sapphire. We demonstrate compatibility with quantum photonics by realizing several varieties of integrated nanophotonic cavities with quality factors exceeding 20000. Additionally, the membranes allow us to significantly improve the coherence and microwave addressability of tin vacancy qubits, allowing us to achieve a coherent spin-photon interface at 4 Kelvin. The bonded diamond membranes and coherent qubits therein can be readily integrated into fully packaged quantum networking nodes.
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