Paper
7 November 1983 CO2 Laser Heating Of Silicon And Applications
H. S. Kwok
Author Affiliations +
Proceedings Volume 0380, Los Alamos Conf on Optics '83; (1983) https://doi.org/10.1117/12.934777
Event: Los Alamos Conference on Optics, 1983, New Mexico, United States
Abstract
Pulsed CO2 laser interaction with doped silicon can produce significant heating of the semiconductor. This heating is studied and two major applications are explored. Fast CO2 laser detection due to the rapid thermal generation of carriers is demonstrated.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. S. Kwok "CO2 Laser Heating Of Silicon And Applications", Proc. SPIE 0380, Los Alamos Conf on Optics '83, (7 November 1983); https://doi.org/10.1117/12.934777
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KEYWORDS
Carbon dioxide lasers

Semiconductor lasers

Silicon

Photodiodes

Pulsed laser operation

Semiconductors

Semiconducting wafers

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