A Double Pass Attachment For The Linear And Plane Mirror Interferometer

Richard R. Baldwin; Graham J. Siddall

doi:10.1117/12.943051

15 October 1984 A Double Pass Attachment For The Linear And Plane Mirror Interferometer

Richard R. Baldwin, Graham J. Siddall

Proceedings Volume 0480, Integrated Circuit Metrology II; (1984) https://doi.org/10.1117/12.943051
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

An optical accessory has been devised for doubling the resolution of the Hewlett-Packard linear and plane mirror interferometers. This device, termed the double pass attachment, does not fold one of the two interfering beams, as in previous attempts to extend resolution optically, and hence does not introduce error due to its own motion. The simple addition of a quarter wave plate to the attachment can be used to give a differential version of the plane mirror interferometer. Various configurations of this differential interferometer, and their application to I.C. lithographic and inspection equipment, are discussed.

Citation Download Citation

Richard R. Baldwin and Graham J. Siddall "A Double Pass Attachment For The Linear And Plane Mirror Interferometer", Proc. SPIE 0480, Integrated Circuit Metrology II, (15 October 1984); https://doi.org/10.1117/12.943051

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