Paper
11 December 1984 On-Line Monitoring Of Surface Roughness By Using Laser
Mitsuhito Kamei, Takahiko Inari
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Abstract
This paper deals with a basic research on an on-line monitoring of surface roughness by using laser. The relation between an intensity distribution of the reflected laser light and the surface profile is studied. A function of the processed r.m.s. roughness is used, which is taken from the spatial filtering of the surface profile measured by stylus method. An experiment was carried out by using a rolled metallic sheet and pieces finished by an electrical discharge machine. The results show that the intensity distribution is approximately proportional to the r.m.s. roughness of a certain filterd surface profile. The experimental results are proved to be reasonable by theoretical analysis.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mitsuhito Kamei and Takahiko Inari "On-Line Monitoring Of Surface Roughness By Using Laser", Proc. SPIE 0508, Production Aspects of Single Point Machined Optics, (11 December 1984); https://doi.org/10.1117/12.944962
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Diffraction

Surface finishing

Surface roughness

Optical filters

Singular optics

Spatial frequencies

Gas lasers

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