PROCEEDINGS VOLUME 0539
1985 MICROLITHOGRAPHY CONFERENCES | 11-14 MARCH 1985
Advances in Resist Technology and Processing II
Editor(s): Larry F. Thompson
Editor Affiliations +
IN THIS VOLUME

1 Sessions, 44 Papers, 0 Presentations, 0 Posters
All Papers  (44)
1985 MICROLITHOGRAPHY CONFERENCES
11-14 March 1985
Santa Clara, United States
All Papers
David S. Soong
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947807
W. D. Hinsberg, C. G. Willson, K. K. Kanazawa
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947808
Ferdinand Rodriguez, Robert J. Groele, Philip D. Krasicky
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947809
Michael P.C. Watts, M.Richard Hannifan
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947810
L. K. White
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947811
S. V. Babu, V. Srinivasan
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947812
Marie C. Flanigan, Ronald W. Wake
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947813
E. ONG, K. L. Tai, R. G. Vadimsky, C. T. Kemmerer, P. M. Bridenbaugh
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947814
Kozo Mochiji, Takeshi Kimura, Hidehito Obayashi, Hideki Maezawa
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947815
Y. Ohnishi, M. Suzuki, K. Saigo, Y. Saotome, H. Gokan
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947816
Robert G. Brault, Randall L. Kubena, Robert A. Metzger
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947817
M. Toukhy, S. Tadros, C. Guglielmo
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947818
John A. Underhill, Van Son Nguyen, Michael Kerbaugh, Dianne Sundling
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947819
M. A. Hartney, A. E. Novembre
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947820
J. Wijdenes, M. J.H.J. Geomini
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947821
Mark P. de Grandpre, David A. Vidusek, Michael W. Legenza
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947822
Debra B. LaVergne, Donald C. Hofer
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947823
Edward D. Roberts
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947824
Medhat A. Toukhy
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947825
Robert C. Daly, Michael J. Hanrahan, Richard W. Blevins
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947826
Y. Yoneda, M. Miyagawa, S. Fukuyama, T. Narusawa, H. Okuyama
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947827
Hideki Tomioka
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947828
A. P. Firth, P. J.S. Ewen, A. E. Owen, C. M. Huntley
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947829
John M. Zeigler, Larry A. Harrah, A.Wayne Johnson
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947830
O. Rohde, M. Riediker, A. Schaffner, J. Bateman
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947831
Shigeru Koibuchi, Asao Isobe, Daisuke Makino, Takao Iwayanagi, Michiaki Hashimoto, Saburo Nonogaki
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947832
Saburo Nonogaki, Michiaki Hashimoto, Takao Iwayanagi, Hiroshi Shiraishi
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947834
Eric Ailing, Craig Stauffer
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947835
Wolfgang Arden, Leonhard Mader
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947836
L. Lauchlan, K. Sautter, T. Batchelder, J. Irwin
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947837
Geoffrey A. Hungerford, William J.O. Boyle
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947838
George M. Benedikt
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947839
M. W. Legenza, D. A. Vidusek, M. de Grandpre
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947840
Andrew V. Brown, William H. Arnold
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947841
J. F. Bohland, H. F. Sandford, S. A. Fine
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947842
John Grunwald, Edwin J. Turner, Allen C. Spencer, David A. Sawoska, Giyora Ben-Shushan
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947843
John S. Petersen, Alan Kozlowski, Kim Eastwood, Mary Kay Swan, Mike Stan
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947844
Ronald W. Wake, Marie C. Flanigan
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947845
M. A. Spak
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947846
Richard E. Hopla, Andrew J. Blakeney, Paulette D. Wright
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947847
H. M. Harris, G. N. Hill, N. W. Cox Jr.
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947848
John Grunwald, Edwin J. Turner, David A. Sawoska, Allen C. Spencer
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947849
Samuel S.M. Fok, Patrick P. Tang, Keith Standiford
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947850
A. T. Jeffries, M. Toukhy, T. R. Sarubbi
Proceedings Volume Advances in Resist Technology and Processing II, (1985) https://doi.org/10.1117/12.947851
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