Commercial Excimer Lasers

Herbert Pummer

doi:10.1117/12.956380

16 July 1986 Commercial Excimer Lasers

Herbert Pummer

Proceedings Volume 0610, Scientific and Engineering Applications of Commercial Laser Devices; (1986) https://doi.org/10.1117/12.956380
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

Excimer lasers form a group of pulsed high-pressure gas lasers which emit at four wave-lengths, namely at 193nm (ArF*), 248nm (KrF*), 308nm (XeCl*) and 351nm (XeF*) in the ultraviolet spectral region. Unlike the infrared radiation from lasers like e.g. Nd:YAG and CO₂, the high energy photons from excimer lasers typically interact with the electronic excitation levels of an absorber and this can lead to chemical bond breaking, ionization or electronic excitation. The excellent focusability of their short wave-length radiation can further be exploited to generate submicron structures.

Citation Download Citation

Herbert Pummer "Commercial Excimer Lasers", Proc. SPIE 0610, Scientific and Engineering Applications of Commercial Laser Devices, (16 July 1986); https://doi.org/10.1117/12.956380

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