PROCEEDINGS VOLUME 0631
1986 MICROLITHOGRAPHY CONFERENCES | 10-12 MARCH 1986
Advances in Resist Technology and Processing III
Editor(s): C. Grant Willson
Editor Affiliations +
IN THIS VOLUME

1 Sessions, 44 Papers, 0 Presentations, 0 Posters
All Papers  (44)
1986 MICROLITHOGRAPHY CONFERENCES
10-12 March 1986
Santa Clara, United States
All Papers
Antoni S. Gozdz, Carolyn Carnazza, Murrae J. Bowden
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963618
John Hayes, William R. Bell II, Richard Ferguson, Andrew R. Neureuther
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963619
Anthony E. Novembre, Elsa Reichmanis, Myrtle Davis
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963620
Seiichi Tagawa, Noriyuki Kouchi, Yasushi Aoki, Hiromi Shibata
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963621
S. A. MacDonald, R. D. Allen, N. J. Clecak, C. G. Willson, J. M.J. Frechet
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963622
Fedor Coopmans, Bruno Roland
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963623
Regine G. Tarascon, Ann Shugard, Elsa Reichmanis
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963624
Wayne E. Feely
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963625
John J. Grunwald, Allen C. Spencer
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963626
C. E. Osuch, K. Brahim, F. R. Hopf, M. J. McFarland, A. Mooring, C. J. Wu
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963627
M. Hanabata, A. Furuta, Y. Uemura
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963628
Kevin J. Orvek, Shane R. Palmer, Cesar M. Garza, Gene E. Fuller
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963629
Y.M. N. Namaste, S. K. Obendorf, F. Rodriguez
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963630
Shuzo Hattori, Shinzo Morita, Masaru Hori, Hitomi Yamada
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963631
Rupert M.R. Gijsen, Hennie J.J. Kroon, Frans A. Vollenbroek, Rene Vervoordeldonk
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963632
Cesar M. Garza, Steven P. Grindle
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963633
R. A. Arcus
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963634
Michele Nuhn, Sungmuk Lee
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963635
Chunshing Chen, Sunny Cheng
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963636
Robert E. Williams, Stan Weaver, Ernest W. Balch, John C. Sardella
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963637
James R. Sheats, Michael M. O'Toole, John S. Hargreaves
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963638
K. J. Polasko, B. F. Griffing
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963639
Shin-ichi Sanada, Masataka Miyamura
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963640
Brian K. Daniels, Charles R. Szmanda, Michael K. Templeton, Peter Trefonas III
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963641
Jay M. Cech, Modest M. Oprysko, Peter L. Young, Kin Li
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963642
Konoe Miura, Tameichi Ochiai, Yasuhiro Kameyama, Shigeo Uoya, Teruhiko Yamazaki
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963643
John E. Spencer, Andrew Hoff
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963644
John L. Nistler, Tom R. Mead, Mark A. Spak
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963645
John T. Grunwald, William F. Cordes III, Keith D. San Giacomo, Joseph Ben-Bassat, Eitan Shalom, Giora Ben-Shushan
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963646
David A. Sawoska, Laurie J. Lauchlan, Laurel J. Smith, Edwin J. Turner, Allen C Spencer, Giora Ben-Shushan
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963647
William F. Cordes III, David A. Sawoska, Allen C. Spencer, Edwin J. Turner
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963648
Rao M. Nagarajan
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963649
M. P. C. Watts, M. R. Hannifan, T. Perera
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963650
V. Srinivasan, S. V. Babu
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963651
Chris A. Mack
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963652
Vic Marriott, Barry Jucha
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963653
W. Ishii, K. Hashimoto, N. Itoh, H. Yamazaki, A. Yokota, H. Nakane
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963654
Noboru Moriuchi, Seiichiro Shirai, Takao Iwayanagi
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963655
H. H. Wang, E. Lin
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963656
H. Hiraoka, J. Duran
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963657
A W. McCullough, D. A. Vidusek, M. W. Legenza, M. de Grandpre, J. Imhof
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963658
Masaru Sasago, Masayuki Endo, Yoshihiko Hirai, Kazufurni Ogawa, Takeshi Ishihara
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963659
Ludwik J. Zych, Gianpaolo Spadini, David A. Vidusek, Michael W. Legenza
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963660
Hiroshi Ohtsuka, Jun Kanamori, Yoshio Itoh, Takayuki Matsuyi
Proceedings Volume Advances in Resist Technology and Processing III, (1986) https://doi.org/10.1117/12.963661
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