Microfabrication Of Planar Waveguide Devices On LiNbO[sub]3[/sub]

W. Doldissen; H. Heidrich; D. Hoffmann

doi:10.1117/12.938122

3 November 1986 Microfabrication Of Planar Waveguide Devices On LiNbO₃

W. Doldissen, H. Heidrich, D. Hoffmann

Proceedings Volume 0651, Integrated Optical Circuit Engineering III; (1986) https://doi.org/10.1117/12.938122
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Tolerances in the process technology of planar electrooptical wave guide device on LiNbO3 are described with emphasis on pattern generation for switching modules of higher complexity.

Citation Download Citation

W. Doldissen, H. Heidrich, and D. Hoffmann "Microfabrication Of Planar Waveguide Devices On LiNbO₃", Proc. SPIE 0651, Integrated Optical Circuit Engineering III, (3 November 1986); https://doi.org/10.1117/12.938122

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