Photoemissive Probing Of High-Speed Signals

A. M. Weiner; P. S. D. Lin; R. B. Marcus; J. Orloff

doi:10.1117/12.940390

1 September 1987 Photoemissive Probing Of High-Speed Signals

A. M. Weiner, P. S. D. Lin, R. B. Marcus, J. Orloff

Proceedings Volume 0774, Lasers in Microlithography; (1987) https://doi.org/10.1117/12.940390
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

High-speed electrical signals on any semiconductor device or circuit are probed by generation of short (80 fs) pulses of photoelectrons at the point of measurement; and performing an energy analysis of the emitted electrons. A temporal resolution of 5.3 ps has been achieved on a photoconductive signal generated on a 5 μm co-planar strip line.

Citation Download Citation

A. M. Weiner, P. S. D. Lin, R. B. Marcus, and J. Orloff "Photoemissive Probing Of High-Speed Signals", Proc. SPIE 0774, Lasers in Microlithography, (1 September 1987); https://doi.org/10.1117/12.940390

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