Paper
18 May 1988 Two-Dimensional Horn Imaging Arrays
Gabriel M. Rebeiz, Yong Guo, David B. Rutledge, Dayalan P. Kasilingam
Author Affiliations +
Abstract
We have demonstrated a two-dimensional horn imaging array at 240 GHz. In this configuration, a dipole antenna is suspended in a horn on a thin silicon-oxynitride membrane. The horns are fabricated by anisotropic etching of silicon in an ethylene-diamine pyrocatechol solution. This results in pyramidal pits bounded by the <111> crystal planes, and where the sides make an angle of 54.7° with the <100> surface plane. The membrane is so thin compared to a wavelength, that the dipole is effectively radiating in free space bounded by conductive horn walls. The dipole antenna is integrated with a bismuth microbolometer detector on the membrane. We have measured the patterns of a single element in a 9 x 9 imaging array at 240 GHz, with a horn opening of 1.45 Å. The directivity of the antenna element found from the two-dimensional pattern measurements is 12.5 dB.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gabriel M. Rebeiz, Yong Guo, David B. Rutledge, and Dayalan P. Kasilingam "Two-Dimensional Horn Imaging Arrays", Proc. SPIE 0879, Sensing, Discrimination, and Signal Processing and Superconducting Materials and Intrumentation, (18 May 1988); https://doi.org/10.1117/12.943977
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KEYWORDS
Imaging arrays

Antennas

Chemical elements

Silicon

Receivers

Superconductors

Anisotropic etching

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