Metal-Silicon Reactions With Laser Pulses

A. Luches; E. D'Anna; G. Leggieri; M. R. Perrone

doi:10.1117/12.968898

16 January 1988 Metal-Silicon Reactions With Laser Pulses

A. Luches, E. D'Anna, G. Leggieri, M. R. Perrone

Proceedings Volume 0952, Laser Technologies in Industry; (1988) https://doi.org/10.1117/12.968898
Event: Laser Technologies in Industry, 1988, Porto, Portugal

Abstract

The work done on the synthesis of metal silicides by using different pulsed lasers (ruby, Nd:glass, excimer) is presented and discussed. We found that excimer lasers offer much better characteristics for annealing of metal/silicon systems in comparison to solid state lasers.

Citation Download Citation

A. Luches, E. D'Anna, G. Leggieri, and M. R. Perrone "Metal-Silicon Reactions With Laser Pulses", Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); https://doi.org/10.1117/12.968898

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