Author Affiliations +
S. Dubkov,1 S. Bulyarskii,2 A. Pavlov,2 A. Trifonov,3 E. Kitsyuk,4 P. Mierczynski,5 T. Maniecki,5 R. Ciesielski,5 S. Gavrilov,1 D. Gromov1
1National Research Univ. of Electronic Technology (Russian Federation)
2Institute of Nanotechnology of Microelectronics (Russian Federation)
3Research Institute of Physical Problems F.V.Lukina (Russian Federation)
4Scientific-Manufacturing Complex “Technological Ctr.” (Russian Federation)
5Lodz Univ. of Technology (Poland)