Advanced Control System For Excimer Lasers

H. Rosenkranz; D. Basting; U. Rebhan; W. Muckenheim

doi:10.1117/12.950135

26 April 1989 Advanced Control System For Excimer Lasers

H. Rosenkranz, D. Basting, U. Rebhan, W. Muckenheim

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950135
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Modern excimer lasers comprise feedback systems to stabilize the output at preselected values. The shortcomings of the conventional systems comprising a single microprocessor and a lot of signal and command lines are (i) low data transfer rate and (ii) sensitivity against electromagnetic interference which is always present within discharge-excited excimer lasers. These shortcomings can be removed by utilizing a local-area network (LAN) with microprocessors at each actuator and detector, which communicate by a single fiberoptic ring line.

Citation Download Citation

H. Rosenkranz, D. Basting, U. Rebhan, and W. Muckenheim "Advanced Control System For Excimer Lasers", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950135

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