Excimer Lasers With Large Discharge Cross Section

H.-J. Cirkel; R. Baumgartl; W. Bette; V. Bruckner; D. Friede; U. Kempfer; R. Muller; M. Schmutzler

doi:10.1117/12.950123

26 April 1989 Excimer Lasers With Large Discharge Cross Section

H.-J. Cirkel, R. Baumgartl, W. Bette, V. Bruckner, D. Friede, U. Kempfer, R. Muller, M. Schmutzler

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950123
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The operating characteristics of a pulse forming network (PFN) for large volume excimer lasers comprising paralleled waterline capacitors are described. The PFN uses different kinds of switches such as thyratrons and a multichannel pseudo spark switch. The X-ray pre-ionizer is composed of a low ohmic pulse generator and an X-ray tube with a hollow cathode. To investigate the evolution and damping of gas inhomogenities, caused by the short laser discharge, optical interferometry with high time resolution is used. Results and conditions are presented for operating the excimer laser at different wavelengths with high energy output.

Citation Download Citation

H.-J. Cirkel, R. Baumgartl, W. Bette, V. Bruckner, D. Friede, U. Kempfer, R. Muller, and M. Schmutzler "Excimer Lasers With Large Discharge Cross Section", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950123

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