Setup Of A Damage Testing Facility For Excimer Laser Radiation

K. Mann; H. Gerhardt

doi:10.1117/12.950140

26 April 1989 Setup Of A Damage Testing Facility For Excimer Laser Radiation

K. Mann, H. Gerhardt

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950140
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

A computer controlled experiment for damage threshold measurements on optical surfaces in the UV spectral region is described in detail. The spatial intensity distribution of the probe beam can be monitored in a plane equivalent to the sample surface using a UV sensitive video camera. A relatively smooth near Gaussian beam profile is obtained. The experimental techniques used for damage recognition involve Nomarski microscopy, He-Ne laser scattering, stereo microscopy with He-Ne laser illumination, fluorescent light analysis as well as photoacoustical measurements. A comparison between the different techniques is given with respect to damage threshold results on a 248 nm high reflection coating. The influence of experimental parameters on the measured threshold fluences such as the number of pulses per site and pulse repetition rate is discussed.

Citation Download Citation

K. Mann and H. Gerhardt "Setup Of A Damage Testing Facility For Excimer Laser Radiation", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950140

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available