Replication of diffractive optics

Felix P. Shvartsman

doi:10.1117/12.170198

28 December 1993 Replication of diffractive optics

Felix P. Shvartsman

Proceedings Volume 10271, Diffractive and Miniaturized Optics: A Critical Review; 102710A (1993) https://doi.org/10.1117/12.170198
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

In recent years surface-relief Diffractive Optical Elements (DOEs), a specialized class of diffractive optical elements, have revolutionized design of optical systems and instruments. Surface-relief diffractive optical components improve performance of the existing optical systems and increase systems compactness and reliability. Surface-relief DOEs can be fabricated as multilevel binary optical elements, or as continuous surface-relief optical elements. A surface-relief DOE is being designed such that incident light interacts with the topography of the surface-relief microstructure including the size and shape characteristics of surface profile features such as indentations and projections as well as their dimensional relationship, to perform a desired optical function. Binary optical elements are being made by the same microlithographic and ion etching techniques used to produce VLSI circuits. Computer-generated continuous surface-relief DOE is recorded by direct laser-beam or e-beam writing in photoresist. Continuous surface-relief DOE can be also recorded in photoresist by interferometric (holographic) technique. After development recorded in photoresist surface-relief microstructures are being ion-beam etched into quartz or other inorganic optical substrates.

Citation Download Citation

Felix P. Shvartsman "Replication of diffractive optics", Proc. SPIE 10271, Diffractive and Miniaturized Optics: A Critical Review, 102710A (28 December 1993); https://doi.org/10.1117/12.170198

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