Short time determination of the standard deviation and the correlation radius of optical surfaces roughness by using their coherent images

Valery Mandrosov

doi:10.1117/12.2284034

19 May 2003 Short time determination of the standard deviation and the correlation radius of optical surfaces roughness by using their coherent images

Valery Mandrosov

Author Affiliations +

Proceedings Volume 10314, Optifab 2003: Technical Digest; 1031419 (2003) https://doi.org/10.1117/12.2284034
Event: OptiFab 2003, 2003, Rochester, NY, United States

Abstract

When fabrication of optical surfaces requires motion of the processed surface, it is useful to make a fast measurement of the roughness parameters such as the standard deviation a and the correlation radius A. This can be performed with the help of two devices, in which the processed surfaces are illuminated by high-energy pulsed laser radiation and their coherent images in diffuse scattered light are analyzed. One of the devices provides determination of the standard deviation a and the correlation radius A. for the processed surface in a fixed domain with an accuracy of 10%; the method is valid for roughness heights larger than 10 nm. The second device provides fast measurement of Cr and A in various domains of the surface. These devices can be used to control 0" and A of a optical surface moving in the process of its fabrication such as, for instance, a surface rotating during its mechanical processing. In particular, this is important for fabricating metal mirrors by metal surface sharpening with the help of diamond-tipped cutting tool.

Citation Download Citation

Valery Mandrosov "Short time determination of the standard deviation and the correlation radius of optical surfaces roughness by using their coherent images", Proc. SPIE 10314, Optifab 2003: Technical Digest, 1031419 (19 May 2003); https://doi.org/10.1117/12.2284034

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