New method for probe position correction for Ptychography

P. Dwivedi; A. P. Konijnenberg; S. F. Pereira; H. P. Urbach

doi:10.1117/12.2270165

26 June 2017 New method for probe position correction for Ptychography

P. Dwivedi, A. P. Konijnenberg, S. F. Pereira, H. P. Urbach

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103292Y (2017) https://doi.org/10.1117/12.2270165
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

For high resolution imaging, X-rays and electron beams are being used. However, for such a short wavelength, imaging with lenses becomes difficult as lenses absorb a part of radiation and lenses with very low aberrations must be used. Ptychography is a lens-less imaging technique which uses intensity information of the multiple diffraction patterns in the far field. These multiple far field diffraction patterns are generated by an unknown object which is scanned by a localized illuminated spot (probe).

Accurate knowledge of initial parameters is important for a good reconstruction of the object. Robustness of the Ptychography Iterative Engine (PIE) has already been studied for inaccurately known initial parameters, where the success of the algorithm was found to be sensitive to the accuracy of the estimate of lateral positions of the probe.
:; We present here a new method to correct the lateral position of the probe with respect to the object. This method is more straightforward to implement than other existing algorithms while comparable accuracy for the lateral position is achieved. Being able to correct the probe positions has positive implication in experiments, in particular at the short wavelength cases. It relaxes the requirement for the experimental set-up.

Citation Download Citation

P. Dwivedi, A. P. Konijnenberg, S. F. Pereira, and H. P. Urbach "New method for probe position correction for Ptychography", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103292Y (26 June 2017); https://doi.org/10.1117/12.2270165

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available