Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation

Deming Shu; Barry Lai; Steven Kearney; Jayson Anton; Wenjun Liu; Jorg Maser; Christian Roehrig; Jonathan Z. Tischler

doi:10.1117/12.2274168

23 August 2017 Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation

Deming Shu, Barry Lai, Steven Kearney, Jayson Anton, Wenjun Liu, Jorg Maser, Christian Roehrig, Jonathan Z. Tischler

Author Affiliations +

Proceedings Volume 10371, Optomechanical Engineering 2017; 103710C (2017) https://doi.org/10.1117/12.2274168
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

The ever-increasing spatial resolution of nanofocusing hard x-ray optics, coupled with the need for long working distances and spectroscopic imaging, requires stages that translate optics and samples over millimeters with trajectory errors of under 10 nm. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, compact vertical and horizontal linear nanopositioning flexure stages, with centimeter-level travel range, have been designed and tested at the Advanced Photon Source (APS) for x-ray instrumentation applications. The mechanical design and finite element analyses of the flexural stages, as well as its preliminary test results with laser interferometers are described in this paper.

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Deming Shu, Barry Lai, Steven Kearney, Jayson Anton, Wenjun Liu, Jorg Maser, Christian Roehrig, and Jonathan Z. Tischler "Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation", Proc. SPIE 10371, Optomechanical Engineering 2017, 103710C (23 August 2017); https://doi.org/10.1117/12.2274168

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