MEMS FTIR spectrometer with enhanced resolution for low cost gas sensing in the NIR

Islam Samir; Yasser M. Sabry; Mazen Erfan; Niveen Badra; Diaa Khalil

doi:10.1117/12.2288996

22 February 2018 MEMS FTIR spectrometer with enhanced resolution for low cost gas sensing in the NIR

Islam Samir, Yasser M. Sabry, Mazen Erfan, Niveen Badra, Diaa Khalil

Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450E (2018) https://doi.org/10.1117/12.2288996
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

In this work, we report the detection of C₂H₂ and CO₂ in the NIR range using a MEMS Fourier Transform Infrared (FTIR) spectrometer. For this purpose, a super resolution autoregressive (AR) algorithm is used. The spectrometer is working in the wavelength range 1300–2500 nm while its core engine is a scanning Michelson interferometer micromachined using deep reactive ion etching (DRIE) technology on SOI wafer. The interferometer scanning mirror is driven by a MEMS electrostatic actuator with travel range corresponding to a resolution of about 30 cm^-1.The spectrometer with the algorithm are used for measuring a standard optical filter with line width of 1 nm and measured line width is 1.7 nm that corresponds to 7.5 cm^-1. The spectrum of a mixture of C₂H₂ and CO₂ is measured using the MEMS spectrometer and a gas cell with 10cm light-gas interaction length. The AR model is applied on the interferogram. The resulting spectrum after the AR application shows an enhanced resolution of 15cm^-1 that led to better identification of the absorption peaks.

Citation Download Citation

Islam Samir, Yasser M. Sabry, Mazen Erfan, Niveen Badra, and Diaa Khalil "MEMS FTIR spectrometer with enhanced resolution for low cost gas sensing in the NIR", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450E (22 February 2018); https://doi.org/10.1117/12.2288996

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