Novel micro-fabricated Fabry-Perot filters in infrared

Branislav Timotijevic; Andrea Dunbar; Arno Hoogerwerf; Nemanja Niketic; Ross Stanley; Michel Despont

doi:10.1117/12.2285363

22 February 2018 Novel micro-fabricated Fabry-Perot filters in infrared

Branislav Timotijevic, Andrea Dunbar, Arno Hoogerwerf, Nemanja Niketic, Ross Stanley, Michel Despont

Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450I (2018) https://doi.org/10.1117/12.2285363
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We have designed, fabricated and tested narrow-band Fabry-Perot filters in the infrared using gold porous mirrors and a silicon spacer layer. The filter peaks at 10 μm and 15 μm have approximately 10% transmission and a 1.5% linewidth. A Fabry-Perot structure with plane metal layers having a similar linewidth would have a transmission of only 0.2%. Thus, for the same linewidth we have improved the transmission by a factor of 50. Apart from the optical enhancements, these filters also have the advantage that they can be made inexpensively in a standard silicon MEMS technology and that their resonances can be finely tuned through post processing.

Conference Presentation

Citation Download Citation

Branislav Timotijevic, Andrea Dunbar, Arno Hoogerwerf, Nemanja Niketic, Ross Stanley, and Michel Despont "Novel micro-fabricated Fabry-Perot filters in infrared", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450I (22 February 2018); https://doi.org/10.1117/12.2285363

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available