Electrostatically operated optical microshutter array for a miniature integrated optical spectrometer

Samir Ilias; Francis Picard; Carl Larouche; Roman Kruzelecky; Wes Jamroz

doi:10.1117/12.2308247

21 November 2017 Electrostatically operated optical microshutter array for a miniature integrated optical spectrometer

Samir Ilias, Francis Picard, Carl Larouche, Roman Kruzelecky, Wes Jamroz

Author Affiliations +

Proceedings Volume 10566, International Conference on Space Optics — ICSO 2008; 1056605 (2017) https://doi.org/10.1117/12.2308247
Event: International Conference on Space Optics 2008, 2008, Toulouse, France

Abstract

16x1 programmable microshutter arrays allowing control of the light transmitted through a transparent substrate supporting the array were successfully fabricated using surface micromachining technology. Each microshutter is basically an electrostatic zipping actuator having a curved shape induced by a stress gradient through the actuator thickness. When a sufficient voltage is applied between the microshutter and the actuation electrode surrounding the associated microslit area, the generated electrostatic force pulls the actuator down to the substrate which closes the microslit. Opening the slit relies on the restoring force. High light transmission through the slit area is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. Static and dynamic responses of the device were determined. The pull-in voltage to close the microslit was about 110 V and the response times to close and open the microslit were about 2 ms and 7 ms, respectively.

Citation Download Citation

Samir Ilias, Francis Picard, Carl Larouche, Roman Kruzelecky, and Wes Jamroz "Electrostatically operated optical microshutter array for a miniature integrated optical spectrometer", Proc. SPIE 10566, International Conference on Space Optics — ICSO 2008, 1056605 (21 November 2017); https://doi.org/10.1117/12.2308247

ACCESS THE FULL ARTICLE

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

Subscribe to Digital Library

Receive Erratum Email Alert

Keywords/Phrases

Search In:

Publication Years