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21 November 2017 Vibration insensitive interferometry
James Millerd, Neal Brock, John Hayes, Brad Kimbrough, Michael North-Morris, James C. Wyant
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Proceedings Volume 10567, International Conference on Space Optics — ICSO 2006; 105671P (2017) https://doi.org/10.1117/12.2308094
Event: International Conference on Space Optics 2006, 2006, Noordwijk, Netherlands
Abstract
The largest limitation of phase-shifting interferometry for optical testing is the sensitivity to the environment, both vibration and air turbulence. An interferometer using temporal phase-shifting is very sensitive to vibration because the various phase shifted frames of interferometric data are taken at different times and vibration causes the phase shifts between the data frames to be different from what is desired. Vibration effects can be reduced by taking all the phase shifted frames simultaneously and turbulence effects can be reduced by averaging many measurements. There are several techniques for simultaneously obtaining several phase-shifted interferograms and this paper will discuss two such techniques: 1) Simultaneous phase-shifting interferometry on a single detector array (PhaseCam) and 2) Micropolarizer phase-shifting array. The application of these techniques for the testing of large optical components, measurement of vibrational modes, the phasing of segmented optical components, and the measurement of deformations of large diffuse structures is described.
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James Millerd, Neal Brock, John Hayes, Brad Kimbrough, Michael North-Morris, and James C. Wyant "Vibration insensitive interferometry", Proc. SPIE 10567, International Conference on Space Optics — ICSO 2006, 105671P (21 November 2017); https://doi.org/10.1117/12.2308094
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KEYWORDS
Phase shifts
Interferometers
Mirrors
Polarizers
Interferometry
Optical testing
Phase interferometry
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