Fabrication Of Light-Weighted Si/SiC LIDAR Mirrors

Jitendra S. Goela; Raymond L. Taylor

doi:10.1117/12.951862

25 July 1989 Fabrication Of Light-Weighted Si/SiC LIDAR Mirrors

Jitendra S. Goela, Raymond L. Taylor

Proceedings Volume 1062, Laser Applications in Meteorology and Earth and Atmospheric Remote Sensing; (1989) https://doi.org/10.1117/12.951862
Event: OE/LASE '89, 1989, Los Angeles, CA, United States

Abstract

Small models of light-weighted Si/SiC LIDAR mirrors have been fabricated via a scalable and cost effective chemical vapor deposition process. These mirrors are about 7.5-cm in diameter and consist of a Si cladded SiC faceplate and a light-weighted structure made of SiC. The light-weighted structure consists of an outer hexagonal cell with six (6) triangular inner cells. No bonding agent was used to attach SiC light-weighted structure to the faceplate. Flat and curved silicon carbide faceplates were replicated on graphite and then Si was cladded to this replicated faceplate in a CVD reactor. The mirrors were polished to a figure better than 1/5 of a wave and a finish of better than 5Å RMS. The scaling of the CVD process to yield Si/SiC light-weighted, f/1.6 mirrors, 40-cm in diameter is underway. The CVD route to fabrication of mirrors is fast and has the potential to yield several mirrors in a few weeks time from a single reactor.

Citation Download Citation

Jitendra S. Goela and Raymond L. Taylor "Fabrication Of Light-Weighted Si/SiC LIDAR Mirrors", Proc. SPIE 1062, Laser Applications in Meteorology and Earth and Atmospheric Remote Sensing, (25 July 1989); https://doi.org/10.1117/12.951862

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