Recently, various surface plasmon polariton (SPP) resonator structures with a tiny volume and a sharp resonance are numerically proposed for sensor, filter and modulator integrated devices. However, there are few experimental demonstrations of such the structure, i.e., a combination of SPP resonator and SPP waveguide, in the range from visible to telecommunication wavelength. We will present several tiny SPP resonator devices with SPP I/O ports, i.e., a combination of SPP resonator with a volume of less than 1 squared micrometer and a channel-type SPP waveguide with a width of 200 nm width. We have fabricated such the resonators for integrated applications by using EB lithography technique and evaluated their optical resonance characteristics for a refractive index sensor in the telecommunication wavelength region. And we will discuss key points to achieve enough performance as integrated functional devices for real applications.
|