Accuracy evaluations of axial localisation algorithms in confocal microscopy

Rongjun Shao; Weiqian Zhao; Lirong Qiu; Yun Wang; Ruirui Zhang

doi:10.1117/12.2501031

6 November 2018 Accuracy evaluations of axial localisation algorithms in confocal microscopy

Rongjun Shao, Weiqian Zhao, Lirong Qiu, Yun Wang, Ruirui Zhang

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 108191O (2018) https://doi.org/10.1117/12.2501031
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

The localisation accuracy of axial peaks is an important factor for height determination in a confocal microscope. Several algorithms have been proposed for height extraction in surface topography measurements. However, some algorithms ignore the influence of error and discrete sampling on the accuracy. This paper analyzes the localisation accuracy of some common algorithms under different aberrations and random errors, and discusses the effect of axial scanning interval on the accuracy of each algorithm. Finally, we get the application scope of each algorithm. Our results offer a reference for selecting algorithms for confocal metrology.

Citation Download Citation

Rongjun Shao, Weiqian Zhao, Lirong Qiu, Yun Wang, and Ruirui Zhang "Accuracy evaluations of axial localisation algorithms in confocal microscopy", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108191O (6 November 2018); https://doi.org/10.1117/12.2501031

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