Simulation and experimental study on the precision glass molding for microstructures on optical glass based on relaxation effect

Zhanchen Zhu; Tianfeng Zhou; Jiaqing Xie; Qian Yu; Jia Zhou; Xibin Wang

doi:10.1117/12.2504777

24 January 2019 Simulation and experimental study on the precision glass molding for microstructures on optical glass based on relaxation effect

Zhanchen Zhu, Tianfeng Zhou, Jiaqing Xie, Qian Yu, Jia Zhou, Xibin Wang

Author Affiliations +

Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 1084014 (2019) https://doi.org/10.1117/12.2504777
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

To manufacture high precision optical glass microstructures, finite element simulation and experiments of precision glass molding (PGM) are carried out to study the influence of relaxation effect on internal stress and deformation of the glass material. Two kinds of microstructures including microgrooves and micropyramids are fabricated by PGM. First, a two-dimensional axisymmetric finite element model of the PGM is established, and three kinds of molding schemes are put forward and analyzed, including quick molding and holding for a period of time, molding with low speed, molding by gravity. The advantages and disadvantages of the three schemes are also analyzed. Second, the microgrooves are fabricated using the scheme of molding by gravity, and then the existing problems are discussed. Finally, the micropyramids are fabricated by the low speed molding method, and the forming profiles are compared.

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Zhanchen Zhu, Tianfeng Zhou, Jiaqing Xie, Qian Yu, Jia Zhou, and Xibin Wang "Simulation and experimental study on the precision glass molding for microstructures on optical glass based on relaxation effect", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 1084014 (24 January 2019); https://doi.org/10.1117/12.2504777

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