Fabrication of subwavelength nanostructured grating for generating radially polarized light by using focused iron beam

Guozun Zhou; Weijian Tian

doi:10.1117/12.2505520

12 December 2018 Fabrication of subwavelength nanostructured grating for generating radially polarized light by using focused iron beam

Guozun Zhou, Weijian Tian

Author Affiliations +

Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 108470U (2018) https://doi.org/10.1117/12.2505520
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

A polarizer element with subwavelength nanostructured grating was fabricated by using focused iron beam. The gratings on the polarizer are variant spatially. By designing the distribution of the gratings, the polarizer can be used to convert circularly polarized light into radially polarized light. The operation wavelength of the element is 532nm, which has been confirmed by an experiment. Parameters associated with the polarized light converted by the polarizer were also measured in the experiment.

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Guozun Zhou and Weijian Tian "Fabrication of subwavelength nanostructured grating for generating radially polarized light by using focused iron beam", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 108470U (12 December 2018); https://doi.org/10.1117/12.2505520

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KEYWORDS

Polarizers

Nanostructuring

Polarization

Nanolithography

Optical design

Dielectric polarization

Etching

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