Automated Calibration Of Optical Photomask Linewidth Standards At The National Institute Of Standards And Technology

James Potzick

doi:10.1117/12.953090

19 July 1989 Automated Calibration Of Optical Photomask Linewidth Standards At The National Institute Of Standards And Technology

James Potzick

Author Affiliations +

Proceedings Volume 1087, Integrated Circuit Metrology, Inspection, and Process Control III; (1989) https://doi.org/10.1117/12.953090
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

An automated system has been developed at the National Institute of Standards and Technology (NIST), formerly the National Bureau of Standards, for calibrating optical photo-mask linewidth standards. This system, controlled by a desktop computer, locates each feature to be measured in the field of view of the microscope, centers and focuses the image, scans the image, and calculates the optical linewidth from the scan data. The results are checked for errors and the process repeated until every feature on the photomask has been calibrated. If statistical tests are passed, a calibration certificate is printed.

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James Potzick "Automated Calibration Of Optical Photomask Linewidth Standards At The National Institute Of Standards And Technology", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953090

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