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11 April 2019 Monolithic high-contrast gratings as highly reflective mirrors: optimization and fabrication
Magdalena Marciniak, Marcin Gębski, James A. Lott, Tomasz G. Czyszanowski
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Proceedings Volume 10928, High Contrast Metastructures VIII; 1092819 (2019) https://doi.org/10.1117/12.2511043
Event: SPIE OPTO, 2019, San Francisco, California, United States
Abstract
High contrast gratings (HCGs) are an attractive alternative to distributed Bragg reflectors (DBRs) as highly reflective mirrors for VCSELs. In our previous work we proposed the use of monolithic HCGs (MHCGs) to reduce the vertical thickness and simplify the epitaxial structure of VCSELs. In this work we discuss the optimization and fabrication of MHCGs. We also analyze the impact of processing imperfections on the power reflectance of MHCGs.
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Magdalena Marciniak, Marcin Gębski, James A. Lott, and Tomasz G. Czyszanowski "Monolithic high-contrast gratings as highly reflective mirrors: optimization and fabrication", Proc. SPIE 10928, High Contrast Metastructures VIII, 1092819 (11 April 2019); https://doi.org/10.1117/12.2511043
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KEYWORDS
Mirrors
Vertical cavity surface emitting lasers
Reflectivity
Refractive index
Electron beam lithography
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