PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
RI Research Instrument’s EUV pellicle transmission qualification tool EUV-PTT uses “effective inband EUV measurement” which is spectrally filtering emission of the EUV-Lamp to 2% bandwidth at 13.5 nm for measuring “as seen by the scanner”. Images of about 20*20 mm² are recorded in < 5 seconds. A full pellicle characterization with < 60 images taken is accomplished in less than one hour.
Recently, we have performed some studies on applying this technique to carbon nano tube pellicles and on measuring the reflectance of pellicles which will be reported. The latter is heavily demanding as reflectances in the range of 0.01 % were measured with sensitivities and reproducibilities in the range of 0.002 %.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Rainer Lebert, Christian Pampfer, Andreas Biermanns-Foeth, Thomas Missalla, Christoph Phiesel, Christian Piel, "EUV pellicle qualification on transmission and reflectance," Proc. SPIE 10957, Extreme Ultraviolet (EUV) Lithography X, 109570Y (14 March 2019); https://doi.org/10.1117/12.2515341