Statistical measurement method of the standard particles through airborne particle counter based on FESEM

Zhiliang Gao; Qizheng Ji; Jian Chen; Xunbiao Zhang; Weihong Zhang; Junge Tan; Chenyan Wang

doi:10.1117/12.2511658

7 March 2019 Statistical measurement method of the standard particles through airborne particle counter based on FESEM

Zhiliang Gao, Qizheng Ji, Jian Chen, Xunbiao Zhang, Weihong Zhang, Junge Tan, Chenyan Wang

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110530I (2019) https://doi.org/10.1117/12.2511658
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

The traceability of cleanness parameter has received high attention from the metrology industry of light-scattering airborne particle counter. Based on the metrology method of the big particle concentration and the traceability method of airborne particle counter’s counting performance on small particle size by statistical analysis, this paper tries to build a coordinate system of the particles distribution on anodic aluminum oxide (AAO) membrane through the counter, choose the statistical samples by aerodynamics, observe these samples on membrane by field emission scanning electron microscope (FESEM), evaluate the uncertainty of measurement on standard particle statistics, analyze the uncertainty range and the key affecting factor, and put forward a method of improving statistics accuracy in process control. The test results prove that the method has important value on improvement of the theory of the cleanness traceability system based on FESEM and statistical analysis.

Citation Download Citation

Zhiliang Gao, Qizheng Ji, Jian Chen, Xunbiao Zhang, Weihong Zhang, Junge Tan, and Chenyan Wang "Statistical measurement method of the standard particles through airborne particle counter based on FESEM", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110530I (7 March 2019); https://doi.org/10.1117/12.2511658

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