Development of hybrid measuring system for the complex micro-arrayed surface

Tong Guo; Zhenshan Sun; Jinping Chen; Xing Fu; Xiaotang Hu

doi:10.1117/12.2509357

7 March 2019 Development of hybrid measuring system for the complex micro-arrayed surface

Tong Guo, Zhenshan Sun, Jinping Chen, Xing Fu, Xiaotang Hu

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110530X (2019) https://doi.org/10.1117/12.2509357
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

As the ultra-precision machining technology is developing in various directions and evolving into a higher level, the micro-nano measurement technology is also developing constantly. According to the different manufacturing processes and texture of measurement objects, the requirements of micro-nano measurement technology vary a lot. Optical Microscopy (OM), Scanning Probe Microscopy (SPM) or Scanning Electron Microscopy (SEM) cannot meet requirements of high efficiency, high resolution and three-dimensional morphology characteristics obtaining at the same time. Hence a hybrid measuring system including the Atomic Force Microscopy (AFM) and vertical scanning white-light interferometry is built. The measurement function of the dual feedback AFM system was verified by scanning a one-dimensional grid and the measurement function of white light vertical scanning interferometer was verified by measuring the step structure and comparing it with a three-dimensional optical profiler. And then the micro-arrayed structure is measured by white light vertical scanning interferometry. The vertices of the micro-arrayed unit structure is scanned by using AFM in the same coordinate system to verify the complex measurement function of the system on the complex micro-arrayed surface.

Citation Download Citation

Tong Guo, Zhenshan Sun, Jinping Chen, Xing Fu, and Xiaotang Hu "Development of hybrid measuring system for the complex micro-arrayed surface", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110530X (7 March 2019); https://doi.org/10.1117/12.2509357

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available