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Increasing miniaturization requires improved and highly miniaturized optical 3D metrology systems. In this paper a basic measurement principle and a proposed optical design of a highly miniaturized endoscopic spatial confocal point distance sensor are presented. The sensor uses a, to our knowledge new technique called spatial confocal point distance measurement. A special feature of the proposed sensor design is the high degree of miniaturization, through femtosecond direct laser writing and the use of optical fiber bundles, which enable an endoscopic application.
Korbinian Prause,Simon Thiele,Alois Herkommer,Harald Giessen,Bernd Pinzer, andMichael Layh
"Concept for a highly miniaturized endoscopic point distance sensor", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560M (21 June 2019); https://doi.org/10.1117/12.2525573
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Korbinian Prause, Simon Thiele, Alois Herkommer, Harald Giessen, Bernd Pinzer, Michael Layh, "Concept for a highly miniaturized endoscopic point distance sensor," Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560M (21 June 2019); https://doi.org/10.1117/12.2525573