Phase measurement deviations in deflectometry due to properties of technical surfaces

Shekhar Kumar Patra; Jonas Bartsch; Michael Kalms; Ralf B. Bergmann

doi:10.1117/12.2527894

3 September 2019 Phase measurement deviations in deflectometry due to properties of technical surfaces

Shekhar Kumar Patra, Jonas Bartsch, Michael Kalms, Ralf B. Bergmann

Author Affiliations +

Proceedings Volume 11102, Applied Optical Metrology III; 111020Q (2019) https://doi.org/10.1117/12.2527894
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Phase Measuring Deflectometry (PMD) is a non-coherent full-field measurement technique based on geometrical optics, usually employed for specular surfaces. The measured phase in PMD corresponds to the position on the display recorded by the camera pixels. Concerning the measurement uncertainty in PMD systems, the camera can be regarded as the best described and most thoroughly modelled part, followed by the display with its nonlinearity or flatness deviation of the monitor surface shape. However, the effect of the properties of technical surfaces on the measurement deviation still lacks detailed investigation. As the errors in phase measurement will introduce subsequent errors into the slope and shape measurement, it is important to study these error sources. This paper investigates the effects of the properties of technical surfaces on phase measurements in a PMD system. We demonstrate the dependence of the deviations of phase measurements on surface roughness using well-defined samples manufactured by high precision diamond turning.

Citation Download Citation

Shekhar Kumar Patra, Jonas Bartsch, Michael Kalms, and Ralf B. Bergmann "Phase measurement deviations in deflectometry due to properties of technical surfaces", Proc. SPIE 11102, Applied Optical Metrology III, 111020Q (3 September 2019); https://doi.org/10.1117/12.2527894

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