A new approach to surface shape and centration measurement on aspheres with the new V-SPOT technology

E. Hofbauer; R. Kometer

doi:10.1117/12.2527650

28 June 2019 A new approach to surface shape and centration measurement on aspheres with the new V-SPOT technology

E. Hofbauer, R. Kometer

Proceedings Volume 11171, Sixth European Seminar on Precision Optics Manufacturing; 111710E (2019) https://doi.org/10.1117/12.2527650
Event: Sixth European Seminar on Precision Optics Manufacturing, 2019, Teisnach, Germany

Abstract

Accurate measurement of centration of aspheric lenses or even freeforms is a challenge for most devices in optical manufacturing. We are providing a new attempt by combining an autocollimation device and a Vignetting Field Stop [1, 2, 3] device to measure lens centration and sagittal surface profile in a deflectometric approach. Both devices work independently at high accuracy. This presentation explains the technical setup, consisting of an autocollimation sensor (ELWIMAT-AKF) and a Vignetting Field Stop Sensor (ELWIMAT V-SPOT), which is mounted together with an air bearing rotary table in a vertical arrangement. Secondly, we provide the results of the centration measurement and the results from the surface reconstruction and slope error from the measured sagittal angle deviations. Finally, the results from a measured asphere (High Level Expert Meeting HLEM sample #3) is critically discussed to state the accuracy and applicability of the proposed measurement attempt.

Citation Download Citation

E. Hofbauer and R. Kometer "A new approach to surface shape and centration measurement on aspheres with the new V-SPOT technology", Proc. SPIE 11171, Sixth European Seminar on Precision Optics Manufacturing, 111710E (28 June 2019); https://doi.org/10.1117/12.2527650

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KEYWORDS

Aspheric lenses

Interferometry

Sensors

Vignetting

Computer generated holography

Reticles

3D metrology

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