Mid-spatial frequency errors in feed direction occurring in ADAPT polishing

S. Killinger; J. Liebl; R. Rascher

doi:10.1117/12.2528114

28 June 2019 Mid-spatial frequency errors in feed direction occurring in ADAPT polishing

S. Killinger, J. Liebl, R. Rascher

Proceedings Volume 11171, Sixth European Seminar on Precision Optics Manufacturing; 111710G (2019) https://doi.org/10.1117/12.2528114
Event: Sixth European Seminar on Precision Optics Manufacturing, 2019, Teisnach, Germany

Abstract

Previous work shows the effectiveness of computer controlled polishing (CCP) with the ADAPT tool by Satisloh for correcting form errors in optics manufacturing. This method however has a risk of producing residual errors in the range of mid spatial frequency errors (MSFE). In order to prevent these errors the residual in feed direction is investigated as well as the behavior at different parameters.

Citation Download Citation

S. Killinger, J. Liebl, and R. Rascher "Mid-spatial frequency errors in feed direction occurring in ADAPT polishing", Proc. SPIE 11171, Sixth European Seminar on Precision Optics Manufacturing, 111710G (28 June 2019); https://doi.org/10.1117/12.2528114

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