Development of linear variable filter and black coatings by PARMS technology for FLORIS HR focal plane array of FLEX mission

Thomas Weber; Marc Lappschies; Stefan Jakobs; Marco Meini; Riccardo Gabrieli; Matteo Taccola

doi:10.1117/12.2536067

12 July 2019 Development of linear variable filter and black coatings by PARMS technology for FLORIS HR focal plane array of FLEX mission

Thomas Weber, Marc Lappschies, Stefan Jakobs, Marco Meini, Riccardo Gabrieli, Matteo Taccola

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Proceedings Volume 11180, International Conference on Space Optics — ICSO 2018; 1118044 (2019) https://doi.org/10.1117/12.2536067
Event: International Conference on Space Optics - ICSO 2018, 2018, Chania, Greece

Abstract

Beside homogeneous filter coatings a coating can also be applied with a linear gradient. Linear gradient or linear variable filters show a gradient of a band edge or central wavelength depending on the filter type in spectral direction and they are homogeneous in spatial direction. In this paper, we present a linear variable narrow band pass filter with full width half maximum of about 8 nm and a transmittance of more than 98% in the wavelength range of 670 nm to 780 nm. The target for the gradient is 3.3. nm/mm. Due to the need of transmittance filter and AR coating are manufactured by means of Plasma Enhanced Magnetron Sputtering (PARMS). Additionally, the linear variable filter for FLEX mission requires a black mask to separate between HR1 and HR2 channel. This mask is also applied by OBJ by means of the PARMS process and a Ti based layer stack. Here, a reflectance of <1.5% in the range of 400 nm to 800 nm can be demonstrated. The definition of black mask was done by means of photolithography.

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Thomas Weber, Marc Lappschies, Stefan Jakobs, Marco Meini, Riccardo Gabrieli, and Matteo Taccola "Development of linear variable filter and black coatings by PARMS technology for FLORIS HR focal plane array of FLEX mission", Proc. SPIE 11180, International Conference on Space Optics — ICSO 2018, 1118044 (12 July 2019); https://doi.org/10.1117/12.2536067

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